Wilson, S. R., Tracy, C. J., & Freeman, J. L., Jr. (1993). Handbook of multilevel metallization for integrated circuits: : materials, technology, and applications. Westwood, NJ.: Noyes Publications.
Παραπομπή Chicago StyleWilson, Syd R., Clarence J. Tracy, and John L. Freeman, Jr. Handbook of Multilevel Metallization for Integrated Circuits: : Materials, Technology, and Applications. Westwood, NJ.: Noyes Publications, 1993.
Παραπομπή MLAWilson, Syd R., Clarence J. Tracy, and John L. Freeman, Jr. Handbook of Multilevel Metallization for Integrated Circuits: : Materials, Technology, and Applications. Westwood, NJ.: Noyes Publications, 1993.
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