Runyan, W. R., Bean, K. E., & Bean, K. E. (1990). Semiconductor integrated circuit processing technology. Reading, Mass.: Addison-Wesley.
Παραπομπή Chicago StyleRunyan, W. R., Kenneth E. Bean, and K. E. Bean. Semiconductor Integrated Circuit Processing Technology. Reading, Mass.: Addison-Wesley, 1990.
Παραπομπή MLARunyan, W. R., Kenneth E. Bean, and K. E. Bean. Semiconductor Integrated Circuit Processing Technology. Reading, Mass.: Addison-Wesley, 1990.
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