Rai-Choudhury, P. (1997). Microlithography. Bellingham, WA.: London: SPIE Optical Engineering Press ;, The Institution of Electrical Engineers.
Παραπομπή Chicago StyleRai-Choudhury, P. Microlithography. Bellingham, WA.: London: SPIE Optical Engineering Press ;, The Institution of Electrical Engineers, 1997.
Παραπομπή MLARai-Choudhury, P. Microlithography. Bellingham, WA.: London: SPIE Optical Engineering Press ;, The Institution of Electrical Engineers, 1997.
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