Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. Bellingham,: London: SPIE Optical Engineering Press ; Institution of Electrical Engineers.
Παραπομπή Chicago StyleRai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham,: London: SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.
Παραπομπή MLARai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham,: London: SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.
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